Multi-axis piezoresistive MEMS force sensor
Résumé
This study presents a new multi-axis friction sensor. This chip is designed to measure normal forces up to 1 mN and friction forces up to 100 μN and will be used to study multi-asperity nanotribology. First prototypes have been manufactured on a p-type Silicon on Insulator wafer (SOI) and characterized.
Fichier principal
90e2d43d-24de-4141-849a-8791d198c916-author.pdf (476.26 Ko)
Télécharger le fichier
Origine : Fichiers produits par l'(les) auteur(s)