Multi-axis piezoresistive MEMS force sensor

Margot Billot; Etienne Herth; Joel Agnus; Emmanuel Piat; Philippe Stempfle

Conference papers

Multi-axis piezoresistive MEMS force sensor

Margot Billot ¹ Etienne Herth ¹ Joel Agnus ¹ Emmanuel Piat ¹ Philippe Stempfle ¹

1 FEMTO-ST - Franche-Comté Électronique Mécanique, Thermique et Optique - Sciences et Technologies (UMR 6174)

Abstract : This study presents a new multi-axis friction sensor. This chip is designed to measure normal forces up to 1 mN and friction forces up to 100 μN and will be used to study multi-asperity nanotribology. First prototypes have been manufactured on a p-type Silicon on Insulator wafer (SOI) and characterized.

Document type :

Conference papers

Domain :

Engineering Sciences [physics] / Acoustics [physics.class-ph]

Engineering Sciences [physics] / Materials

Engineering Sciences [physics] / Micro and nanotechnologies/Microelectronics

Engineering Sciences [physics] / Automatic

Computer Science [cs] / Data Structures and Algorithms [cs.DS]

Complete list of metadatas

https://hal.archives-ouvertes.fr/hal-03107815
Contributor : As2m Femto-St <>
Submitted on : Tuesday, January 12, 2021 - 7:58:33 PM
Last modification on : Thursday, January 21, 2021 - 3:19:25 AM

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