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Multi-axis piezoresistive MEMS force sensor

Abstract : This study presents a new multi-axis friction sensor. This chip is designed to measure normal forces up to 1 mN and friction forces up to 100 μN and will be used to study multi-asperity nanotribology. First prototypes have been manufactured on a p-type Silicon on Insulator wafer (SOI) and characterized.
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https://hal.archives-ouvertes.fr/hal-03107815
Contributor : As2m Femto-St <>
Submitted on : Tuesday, January 12, 2021 - 7:58:33 PM
Last modification on : Thursday, January 21, 2021 - 3:19:25 AM

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  • HAL Id : hal-03107815, version 1

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Margot Billot, Etienne Herth, Joel Agnus, Emmanuel Piat, Philippe Stempfle. Multi-axis piezoresistive MEMS force sensor. Journees Nationales sur les Technologies Emergentes en Micronanofabrication, Nov 2015, Lyon, France. ⟨hal-03107815⟩

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